material | purity | material | purity |
Al | 3N~5N | Cu | 3N7 |
Ag | 4N | Fe | 4N |
Au | 4N | Co | 3N |
Bi | 4N | Ni | 3N5 |
C | 3N | Ta | 3N5 |
Cr | 3N5 | Ti | 3N |
Rotatable Nb Target | Planar Ag target | Sn | 5N |
Rotatable Cu target | Rotatable Ag Target | ||
Rotatable Ti target | Planar Mo target | ||
Planar Cr Target | Rotatable Zr Target | ||
Rotatable Si Target |