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  • TiOx Target

TiOx Target

  • MF : TiO2
  • MW: 79.87
  • CAS: 1317-80-2
  • EINECS:    215-282-2
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Using plasma as heat source, the corresponding powder was heated to molten or semi molten state, and then the dense coating was formed on the surface of the back tube at high speed.


Purity: ≥ 99.9%

Density: ≥ 4.0 (g / cm3)

SiO2:≤100ppm

P2O5:≤10PPM

Cu:≤18ppm

Fe:≤80ppm

Total impurities: ≤ 1000ppm

Resistivity: ≤ 0.5 (Ω. Cm)

Size: according to customers' requirments.


Application:

Low-E coated glass

Tool coating, Decoration coating

TiOx-target _20210705094145.jpg

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